Specifications
Model | EVC-0912-4-1 | EVC-1215-4-1 | EVC-1520-4-1 | EVC-1624-4-1 | EVC-2030-4-1 |
Max. Substrate Size | 900 x 1200 mm | 1200 x 1500 mm | 1500 x 2000 mm | 1650 x 2440 mm | 2000 x 3000 mm |
Quantity of Loaded Substrate | 4 pcs / batch (base on max. flat substrate size) |
4 pcs / batch (base on max. flat substrate size) |
4 pcs / batch (base on max. flat substrate size) |
4 pcs / batch (base on max. flat substrate size) |
4 pcs / batch (base on max. flat substrate size) |
Chamber Internal Dimensions | 1100 (H) x 1400 (L) x 950 (W) mm | 1400 (H) x 1620 (L) x 950 (W) mm | 1680 (H) x 2200 (L) x 950 (W) mm | 1800 (H) x 2650 (L) x 950 (W) mm | 2200 (H) x 3200 (L) x 950 (W) mm |
Batch Cycle Time | ~ 12 min. | ~ 12 min. | ~ 12 min. | ~ 12 min. | ~ 12 min. |
Productivity | ~ 172 m2 / 8 hrs | ~ 288 m2 / 8 hrs | ~ 480 m2 / 8 hrs | 644 m2 / 8 hrs | 960 m2 / 8 hrs |
Max. Vacuum Pressure | 3 x 10-3 Pa | 3 x 10-3 Pa | 3 x 10-3 Pa | 3 x 10-3 Pa | 3 x 10-3 Pa |
Time Taken From Atmosphere to 5 x 10-2 Pa | < 7 min. | < 7 min. | < 7 min. | < 7 min. | < 7 min. |
Evaporation Power | 30 KW | 35 KW | 40 KW | 45 KW | 50 KW |
Total Install Power | 60 KW | 70 KW | 80 KW | 90 KW | 100 KW |